本文
No.9（2014）5.Development of the ozone measuring instrument using the deep ultraviolet light-emitting diode
Hirotaka Nakamura, Yuji Takeda, Hiroyasu Sugano, Yumi Ahiko, Yoshinobu Aoyagi
Monitoring of the ozone concentration in the atmosphere or in a work environment is important as ozone is harmful for the natural environment and human body depending on its density. Therefore, A high sensitivity and convenient ozone sensing system needs to be developed in order to measure the ozone concentration. Presently, the Hg lamp is used for measuring the ozone concentration by ultraviolet absorptivity, but it has challenges such as the use of the harmful mercury and a big size. In this study, we have developed an ozone concentration measuring equipment using the deep ultra-violet light emitting diode (DUV-LED), instead of the Hg lamp. We confirmed that the DUV-LED is a very useful lighting source for ozone sensing.
Keywords
Ozone gas, Deep ultra-violet light emitting diode (DUV-LED), Ozone concentration measurement, Si-PD
