No.4（2001）11.p-n Junction made from spin-on-glass

Elito KAZAWA and Takeshi UENO

Micromachined silicon sensors are designed for various purposes. For example, silicon microfabricated cantilevers with piezoresistive readout are now successfully used in commercial atomic force microscope. These piezoresitors are isolated by using p-n junction which is made by ion implantation. In this paper, a new approach is introduced for making p-n junction with doped spin-on glass. Spin-on glass (SOG) has been widely used in semiconductor microelectronics processes where thin high quality dielectric films are desired. The films can be prepared by spraying, dip-coating, or spinning of an organosilicon on to a solid substrate. The design, fabrication, and experimental characterization is presented.

Keywords
spin-on-glass, micromachine, p-n junction, photo-sensors

Back to Contents