No.4（2001）7.Thermal properties of DLC film prepared by ionized evaporation

Atsushi MITSUO, Kazuo MORIKAWA, Nobuhiro NIHIRA, Tohru SUMIYA and Kaoru SUZUKI

Diamond-like carbon (DLC) films were prepared on stainless steel substrates by ionized evaporation, and were investigated for thermal stability. Thermo-gravimetric analysis and thermal desorption spectrometry were utilized for the evaluation of the thermal properties of DLC film. Raman spectroscopy was also utilized for the evaluation of the structure of DLC film after annealing. The friction coefficient of DLC film annealed at various temperatures was measured by a ball-on-disc friction meter. The weight of DLC film was reduced significantly from the temperature of 823 K. Hydrogen desorption from DLC film was recognized gradually at 673 K and above, and rapidly at 873 K and above. It was estimated that graphitization occurred subsequently dehydrization of DLC. The friction coefficient increased with rising the annealing temperature. It was concluded that the thermal resistivity of DLC film was 673 K in air.

Keywords
DLC film, Thermal Properties, Hydrogen Desorption, Graphitization, Friction

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