No.1（2006）17.Fabrication of Glass Biochips Using Molding Method

Tomonori Sasaki, Masaharu Takahashi, Ryutaro Maeda, Keizou Nishihara, Yashufumi Takashima, Jyun-ichi Uegaki, Toshihiko Tanaka, Tomokazu Maeno, Zhen Yang

We report a pattern generation method on a glass wafer using a hot embossing technique. Microstructures were formed on BorofloatR, a low fluorescent glass wafer, using a glassy carbon mold. A multi-channel pattern of 70 um lines and 400 um spaces were generated on a glassy carbon plate with a size of 20 mm x 20 mm x 0.5 mm, using a laser machine. Both the wafer and the mold were heated to 655°C, and the embossing was carried out by pressing at 2 MPa under vacuum of 0.07 Pa. This state was maintained for 20 min, and then the embossed piece cooled down to 200°C naturally in the vacuum chamber at atmospheric pressure. The patterns on the mold were transferred neatly to the glass. One fabrication cycle is about 1.5 hours. This method shows great potential to fabricate bio-MEMS devices efficiently at very low cost. The main is to fabricate the devices for highly sensitive fluorescent detection applications, which is very difficult to achieve using plastic substrates. Assembly of chip devices made with this glass has been demonstrated.

Keywords

molding method, bio-MEMS

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