No.7（2004）4.Development of a small module on the sensor circuit for use with manufacture lines

Takeshi KOBAYASHI, Shoichi HIRATSUKA, Kiyoshi ITOH and Mihoko IGARASHI

Many sensors, such as temperature and pH sensors, are used in manufacture lines, semiconductor fabrication machines and equipment. However, in the case of manufacture lines, what often happens is that a system dealing only with equipment is usually constructed. Therefore, whenever a manufacture line is changed, a system change must also be made, resulting in a loss of flexibility. In light of this, the sensor circuit (The circuit which processes the signal from a sensor) was module-ized, and a small circuit which is much more flexible was designed and made as an experiment. Using a personal computer, data about the items made in the experiment were communicated by USB, and were treated as a system which collects data. Consequently, it can respond to temperature sensors or pH sensors using a module about the size of a 3cm angle. From this point on, it now corresponds quickly to the trust trial production etc. using this technology.

Keywords
sensor circuit, temperature, pH, module-ized

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