本文
No.7(2004)3.Ductility mode processing of a micro style path using diamond tool
Toshimichi MORI, Yuuchi OKAZAKI, Katuyuki ABE
Various processing conditions and processing characteristics of diamond detailed milling processing over brittle materials centering on silica glass are clarified for the purpose of the establishment of detailed machining technology used to form a detailed style path network on brittle materials which are required for the realization of micro devices used for DNA chips and microchemistry compositions. An immense market is expected to develop in the near future targeting sensors for environmental measurement / analysis, and medical treatments etc.
Keywords
ductile mode, brittle material, single point daiamond,silica glass