No.4（2001）6.Preparation of nitrogen-containing DLC films by ionized evaporation

Kazuo MORIKAWA, Atsushi MITHUO and Nobuhiro NIHIRA

It was attempted to deposit nitrogen-containing diamond-like carbon (DLC) films from vaporized benzene (C₆H₆) and nitrogen gas as source materials, and the deposition condition, nitrogen content and film characteristics were investigated. Although the concentration ratio of nitrogen to carbon and hydrogen in the films could be controlled by means of the flow ratio of nitrogen to C₆H₆, and it was at a maximum at 0.16. The deposition rate was decreased with the increasing the nitrogen flow ratio. The deposited films had as fine a structure as an amorphous structure without any precipitations, and Raman spectra from them had a broadening peak at 1560 cm^-1 with a shoulder at 1390 cm^-1 and showed non-symmetric shapes peculiar to DLC. Although the internal stress of the nitrogen-containing DLC films was the compressive, it was half that of the DLC films deposited by ionized evaporation.

Keywords
Ionized evaporation, Nitrogen, Carbon film, DLC, Internal stress

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